Using metamaterials, light-driven additive manufacturing, and other techniques, researchers have created innovative pressure ...
Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
Abstract: Pressure sensors have widespread applications across various fields in air and underwater environments. However, the drastic pressure difference makes it hard for pressure sensors to measure ...
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